Modeling and numerical simulation of laser matter interaction and ablation with a 193 nanometer laser for nanosecond pulse

Abstract

Purpose

The aim of this paper is to develop and validate a model and a numerical code describing the laser matter interaction and also laser ablation. The laser wavelength is 193 nm and the pulse duration is several nanoseconds.

Design/methodology/approach

The developed model is based on strong theoretical background (cf. references). The electronic nonequilibrium aspect is always taken into account. The electronic nonequilibrium is one of the key aspect the UV laser matter interaction and must be treated carefully and that is not always the case. The numerical code was developed using efficient and versatile numerical methods. The model and simulations are always compared to experiments in order to validate them and also to find their limitations.

Findings

This work has greatly improved the code accuracy. The key role of the electronic nonequilibrium is also demonstrated. From experimental comparisons it is obvious that photo‐ablation should be taken into account for the lower fluences, but to do so, a completely new approach must be developed.

Originality/value

This work describes the whole laser ablation process with the electronic nonequilibrium effects properly modeled. The numerical results has always been confronted to experiments, in most of the cases the agreement was very good. When it was not the case, explanations have been sought along with ways to improve the approach.

Citation

Parisse, J.D., Sentis, M. and Zeitoun, D.E. (2011), "Modeling and numerical simulation of laser matter interaction and ablation with a 193 nanometer laser for nanosecond pulse", International Journal of Numerical Methods for Heat & Fluid Flow, Vol. 21 No. 1, pp. 73-94. https://doi.org/10.1108/09615531111095085