Structural, optical and sensing properties of ZnS thick films deposited by RF magnetron sputtering technique at different powers
ISSN: 1708-5284
Article publication date: 15 April 2020
Issue publication date: 21 May 2020
Abstract
Purpose
This study aims to carry out the deposition of zinc sulfide (ZnS) thick films on glass and silicon (100) substrates using radio frequency (RF) magnetron sputtering method at different powers. Film structure has been analyzed by X-ray diffraction (XRD); the patterns showed that the films possesses a cubic structure with (111) preferred orientation. Photoluminance (PL) intensity of the films has been related to the crystallinity, which is varied with the power.
Design/methodology/approach
Scanning electron microscope (SEM) images have been used to discover the films’ morphology. The stoichiometry has been confirmed by energy dispersive X-ray spectroscopy (EDX) analysis. MicroRaman spectroscopy has been used to validate the film structure. Gas-sensing studies were carried out by means of a static gas chamber to sense acetone, ethanol, methanol, H2O and NH3 vapor in air ambient.
Findings
ZnS has a stoichiometric and cubic structure. The band gaps and photoluminance intensity of the films are correlated with the crystallinity, which is varied with the power. The EDX analysis approved the stoichiometry of the prepared films. Acetone, ethanol, humidity (H2O), methanol and NH3 vapor gases were used to justify the sensing properties at 25°C of the thickest ZnS film.
Originality/value
High-quality ZnS films have been obtained at different powers without annealing. Gases sensing properties at 25°C are justified for deposited ZnS films using acetone, ethanol, humidity (H2O), methanol and NH3 vapor gases. It reveals good response for NH3 and humidity vapors at room temperature; the sensing functioning at this temperature was attractive in recent research.
Keywords
Acknowledgements
The authors greatly acknowledge funds to this project by Professor I. Othman, the Director General of the Atomic Energy Commission of Syria, and Dr S. Haddad for valuable discussions.
The authors would like to thank Professor I. Othman, Director General, for his support.
Citation
Abdallah, B., Kakhia, M. and Zetoune, W. (2020), "Structural, optical and sensing properties of ZnS thick films deposited by RF magnetron sputtering technique at different powers", World Journal of Engineering, Vol. 17 No. 3, pp. 381-388. https://doi.org/10.1108/WJE-10-2019-0300
Publisher
:Emerald Publishing Limited
Copyright © 2020, Emerald Publishing Limited