Keywords
Citation
Rigelsford, J. (2003), "A Guide to Microelectromechanical Systems", Assembly Automation, Vol. 23 No. 4. https://doi.org/10.1108/aa.2003.03323dae.003
Publisher
:Emerald Group Publishing Limited
Copyright © 2003, MCB UP Limited
A Guide to Microelectromechanical Systems
A Guide to Microelectromechanical Systems
P. GoodmanERA Technology200296 pp.ISBN 0-7008-0754-3£250.00
Keywords: MEMS, Microelectronics
"A Guide to Microelectromechanical Systems" provides an overview of microelectromechanical systems (MEMS) and the MEMS industry. The report is well written and enables those who are new to this technology to grasp the fundamental concepts, appreciate the advantages of MEMS, and find out who the major developers of MEMS are.
The book comprises ten chapters and after a brief introduction to the subject, addresses the Advantages and Examples of MEMS. Given examples of MES devices and their uses it includes: accelerometers, gyroscopes, ink-jet printer heads, pressure sensors, microspectrometers, and drug delivery systems and micro-pumps.
Procedure for use of MEMS is addressed in chapter 3, while requirements, analytical equations, and computer assistance are presented in chapter 4, Design of MEMS – Modelling. The following four chapters discuss MEMS Materials, MEMS Fabrication Processes, Packaging, and MEMS Designs, respectively. Subjects addressed include: photolithography, wet and dry etching, chemical vapour deposition (CVD), actuation methods, creation of suspended structures, and micro-fluidics.
Market growth in MEMS, commercial availability of MEMS devices, and economics of MEMS are amongst the subjects addressed in chapter 9, Who's Who in MEMS. The final chapter of the book provides Conclusions and highlights several areas where MEMS devices may be more commonly found in the future.
Jon Rigelsford