New MagnaTran 7 robot from Brooks Automation increases cluster tool throughput performance by up to 60 per cent

Citation

(1998), "New MagnaTran 7 robot from Brooks Automation increases cluster tool throughput performance by up to 60 per cent", Industrial Robot, Vol. 25 No. 1. https://doi.org/10.1108/ir.1998.04925aaf.004

New MagnaTran 7 robot from Brooks Automation increases cluster tool throughput performance by up to 60 per cent

New MagnaTran 7 robot from Brooks Automation increases cluster tool throughput performance by up to 60 per cent

Brooks Automation, Inc. (NASDAQ:BRKS) ("Brooks" or the "Company"), a leading supplier of automation systems and equipment control solutions for the semiconductor and flat panel display process equipment industries, announces a new high throughput MagnaTran(TM) 7 robot for cluster tool wafer transport in semiconductor manufacturing. Smaller, faster, and lighter than previous robot designs, the MagnaTran 7 uses Brooks' patented time optimal trajectory to optimize transfer speeds of both 200mm and 300mm wafers for multiple cluster tool applications. The dynamic speed of the MagnaTran 7 can dramatically increase throughput of PVD, CVD, Etch, RTP, Clean, and Ash cluster tools utilizing Brooks Automation platforms. "We are delighted with the significant throughput enhancements we have been able to obtain with the MagnaTran 7 robot on our new Marathon Express(TM) Platform", said Michael Pippins, Brooks' VP Sales and Marketing. "In PVD cluster tool applications with up to 6 process modules in a serial flow, we have achieved throughput rates as much as 60 per cent higher compared to other robot designs. This large gain can be attributed, in part, to the Brooks' patented dual leapfrog arm configuration which is able to pick-and-place wafers without the need for arm rotation". Utilizing direct drive technology and digital signal processing (DSP), the MagnaTran 7 offers precise control of robot movements which are critically damped to provide optimal velocity. Equipment and semiconductor manufacturers can specify robot arm, end-effector, and firmware components to customize the MagnaTran 7 robot for a variety of cluster tool transport needs. Configuration options include Brooks' patented single BiSymetrik (TM) arm, dual (same-side) Leapfrog (TM) or dual (opposing) end-effector arms. With no dynamic seals, the MagnaTran 7 is built to withstand the high temperatures associated with UHV applications while maintaining top particle performance. Designed to perform at a MCBF (meancycles between failure) rate of 10 million cycles, MagnaTran 7 provides the highest reliability, safety, and serviceability standards in the industry today. In addition to direct safety interlocks, a unique user-programmable access zone feature reduces the potential for collisions during manual operations by preventing the robot from entering pre-defined areas of the cluster tool. The MagnaTran 7's flexible modular design and re-teach option enable it to be reconfigured or replaced on-site quickly and efficiently. In some instances field replacement can be completed in less than one hour. MagnaTran 7 is backed by Brooks' global service and support network. Via remote modem support, Brooks experts can monitor robot performance and acceleration at the end-effector, adjust motion parameters and diagnose problems. This same feature enables equipment or process engineers to monitor robot performance from a workstation outside of the cleanroom environment. All events or errors are time and date stamped, then logged and stored into the robot's permanent memory system for future diagnosis. For further information on Brooks Automation, Inc., see their Web site at: http://www. brooks.com