Citation
(2010), "Ilion+™: planar surface preparation for SEM cross section viewing", Microelectronics International, Vol. 27 No. 3. https://doi.org/10.1108/mi.2010.21827cad.001
Publisher
:Emerald Group Publishing Limited
Copyright © 2010, Emerald Group Publishing Limited
Ilion+™: planar surface preparation for SEM cross section viewing
Ilion+™: planar surface preparation for SEM cross section viewing
Article Type: New products From: Microelectronics International, Volume 27, Issue 3
Gatan, Inc. has introduced the Ilion+™, a significant advance in the preparation of large planar cross sections for microscopic imaging and microanalysis. The Ilion+is a dedicated, ion beam based system for the preparation of large area planar cross sections from challenging scanning electron microscope samples. The Ilion+uses a proprietary milling system that exposes significantly greater areas than traditional FIB milling while encompassing a wider range of delicate samples not compatible with mechanical polishing and other techniques. The system is easy to install and operate allowing users to begin making samples quickly. The Ilion+design is based on the proven Gatan PIPS™ (precision ion polishing system).
For more information visit: www.gatan.com